@article{PFMT_2012_3_a6,
     author = {A. N. Serdyukov and S. V. Shalupaev and Yu. V. Nikitjuk and A. A. Sereda},
     title = {Process research of laser splitting silicon wafers cutout in the plane (110)},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {37--40},
     publisher = {mathdoc},
     number = {3},
     year = {2012},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2012_3_a6/}
}