TY  - JOUR
AU  - M. A. Yarmolenko
AU  - A. A. Rogachev
AU  - A. V. Rogachev
AU  - D. L. Gorbochev
TI  - Kinetic characteristics of dispersion of organosilicon compounds in vacuum and molecular structure of the coatings, deposited from volatile products of dispersion
JO  - Problemy fiziki, matematiki i tehniki
PY  - 2011
SP  - 32
EP  - 38
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/PFMT_2011_3_a5/
LA  - ru
ID  - PFMT_2011_3_a5
ER  -