%0 Journal Article %A M. A. Yarmolenko %A A. A. Rogachev %A A. V. Rogachev %A D. L. Gorbochev %T Kinetic characteristics of dispersion of organosilicon compounds in vacuum and molecular structure of the coatings, deposited from volatile products of dispersion %J Problemy fiziki, matematiki i tehniki %D 2011 %P 32-38 %N 3 %I mathdoc %U http://geodesic.mathdoc.fr/item/PFMT_2011_3_a5/ %G ru %F PFMT_2011_3_a5