@article{PFMT_2011_3_a5, author = {M. A. Yarmolenko and A. A. Rogachev and A. V. Rogachev and D. L. Gorbochev}, title = {Kinetic characteristics of dispersion of organosilicon compounds in vacuum and molecular structure of the coatings, deposited from volatile products of dispersion}, journal = {Problemy fiziki, matematiki i tehniki}, pages = {32--38}, publisher = {mathdoc}, number = {3}, year = {2011}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/PFMT_2011_3_a5/} }