%0 Journal Article
%A V. V. Malyutina-Bronskaya
%A А. М. Polikanin
%A V. B. Zalesskiy
%A A. V. Semchenko
%A V. V. Sidsky
%A V. E. Gayshun
%T Synthesis of heterostructures SiO$_2$/ZnO/Si  by sol-gel method
%J Problemy fiziki, matematiki i tehniki
%D 2011
%P 24-27
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/PFMT_2011_3_a3/
%G ru
%F PFMT_2011_3_a3