TY - JOUR AU - E. S. Voropay AU - K. F. Ermalitskaia AU - A. P. Zazhogin TI - Laser layer wise quantitative analysis with submicron resolution of functional coatings of industrial products JO - Problemy fiziki, matematiki i tehniki PY - 2011 SP - 26 EP - 30 IS - 2 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/PFMT_2011_2_a4/ LA - ru ID - PFMT_2011_2_a4 ER -