%0 Journal Article %A E. S. Voropay %A K. F. Ermalitskaia %A A. P. Zazhogin %T Laser layer wise quantitative analysis with submicron resolution of functional coatings of industrial products %J Problemy fiziki, matematiki i tehniki %D 2011 %P 26-30 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/PFMT_2011_2_a4/ %G ru %F PFMT_2011_2_a4