@article{PFMT_2010_2_a8,
     author = {D. A. Golosov and S. N. Melnikov and S. P. Kundas and A. P. Dostanko},
     title = {Prediction of targets erosion in magnetron sputtering systems},
     journal = {Problemy fiziki, matematiki i tehniki},
     pages = {62--67},
     publisher = {mathdoc},
     number = {2},
     year = {2010},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/PFMT_2010_2_a8/}
}