%0 Journal Article
%A R. Hart'anský
%A J. Hricko
%A M. Mierka
%A J. Halgoš
%A M. Dzuriš
%T MEMS Sensor of Force
%J Russian journal of nonlinear dynamics
%D 2020
%P 85-92
%V 16
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/ND_2020_16_1_a6/
%G en
%F ND_2020_16_1_a6