@article{ND_2020_16_1_a6, author = {R. Hart'ansk\'y and J. Hricko and M. Mierka and J. Halgo\v{s} and M. Dzuri\v{s}}, title = {MEMS {Sensor} of {Force}}, journal = {Russian journal of nonlinear dynamics}, pages = {85--92}, publisher = {mathdoc}, volume = {16}, number = {1}, year = {2020}, language = {en}, url = {http://geodesic.mathdoc.fr/item/ND_2020_16_1_a6/} }