%0 Journal Article %A A. E. Atamuratov %A B. O. Jabbarova %A M. M. Khalilloev %A A. Yusupov %A K. Sivasankaran %A J. C. Chedjou %T Impact of the channel shape, back oxide and gate oxide layers on self-heating in nanoscale JL FINFET %J Nanosistemy: fizika, himiâ, matematika %D 2022 %P 148-155 %V 13 %N 2 %I mathdoc %U http://geodesic.mathdoc.fr/item/NANO_2022_13_2_a2/ %G en %F NANO_2022_13_2_a2