%0 Journal Article
%A I. Ya. Mittova
%A V. F. Kostryukov
%A N. A. Ilyasova
%A B. V. Sladkopevtsev
%A A. A. Samsonov
%T Modification of nanoscale thermal oxide films formed on indium phosphide under the influence of tin dioxide
%J Nanosistemy: fizika, himiâ, matematika
%D 2020
%P 110-116
%V 11
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/NANO_2020_11_1_a12/
%G en
%F NANO_2020_11_1_a12