%0 Journal Article
%A D. M. Mitin
%A F. Yu. Soldatenkov
%A A. M. Mozharov
%A A. A. Vasil'ev
%A V. V. Neplokh
%A I. S. Mukhin
%T Annealing atmosphere influence on contact resistivity of ohmic Pd/Ge/Au contact to n-GaAs
%J Nanosistemy: fizika, himiâ, matematika
%D 2018
%P 789-792
%V 9
%N 6
%I mathdoc
%U http://geodesic.mathdoc.fr/item/NANO_2018_9_6_a12/
%G en
%F NANO_2018_9_6_a12