%0 Journal Article
%A A. E. Atamuratov
%A U. A. Aminov
%A Z. A. Atamuratova
%A M. Halillaev
%A A. Abdikarimov
%A H. R. Matyakubov
%T The lateral capacitance of nanometer MNOSFET with a single charge trapped in oxide layeror at SiO$_2$ -- Si$_3$N$_4$ interfaceat
%J Nanosistemy: fizika, himiâ, matematika
%D 2015
%P 837-842
%V 6
%N 6
%I mathdoc
%U http://geodesic.mathdoc.fr/item/NANO_2015_6_6_a12/
%G en
%F NANO_2015_6_6_a12