TY - JOUR AU - Nazme Moushumy AU - Kamal Alameh AU - V. Rajendran AU - Yong Tak Lee TI - Silver-nanoparticle-based etch mask control for subwavelength structure development JO - Nanosistemy: fizika, himiâ, matematika PY - 2013 SP - 387 EP - 394 VL - 4 IS - 3 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/NANO_2013_4_3_a12/ LA - en ID - NANO_2013_4_3_a12 ER -