%0 Journal Article
%A Nazme Moushumy
%A Kamal Alameh
%A V. Rajendran
%A Yong Tak Lee
%T Silver-nanoparticle-based etch mask control for subwavelength structure development
%J Nanosistemy: fizika, himiâ, matematika
%D 2013
%P 387-394
%V 4
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/NANO_2013_4_3_a12/
%G en
%F NANO_2013_4_3_a12