TY - JOUR AU - V. N. Simonov AU - N. L. Matison AU - O. V. Boytsova AU - E. B. Markova TI - Modeling of vibration of nanoporous microcantilevers from anodic aluminum oxide for biochemical sensors JO - Matematičeskoe modelirovanie PY - 2020 SP - 31 EP - 42 VL - 32 IS - 8 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/MM_2020_32_8_a2/ LA - ru ID - MM_2020_32_8_a2 ER -