TY  - JOUR
AU  - Yu. A. Eremin
AU  - A. G. Sveshnikov
TI  - Near field formation via colloid particles in the problems of silicon substrates nanoprocessing
JO  - Matematičeskoe modelirovanie
PY  - 2017
SP  - 103
EP  - 114
VL  - 29
IS  - 6
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_2017_29_6_a6/
LA  - ru
ID  - MM_2017_29_6_a6
ER  -