%0 Journal Article
%A Yu. A. Eremin
%A A. G. Sveshnikov
%T Near field formation via colloid particles in the problems of silicon substrates nanoprocessing
%J Matematičeskoe modelirovanie
%D 2017
%P 103-114
%V 29
%N 6
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_2017_29_6_a6/
%G ru
%F MM_2017_29_6_a6