@article{MM_2017_29_6_a6,
     author = {Yu. A. Eremin and A. G. Sveshnikov},
     title = {Near field formation via colloid particles in the problems of silicon substrates nanoprocessing},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {103--114},
     publisher = {mathdoc},
     volume = {29},
     number = {6},
     year = {2017},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2017_29_6_a6/}
}