@article{MM_2017_29_10_a6, author = {G. N. Kuvyrkin and I. Yu. Savelyeva and A. V. Zhuravsky}, title = {Numerical modelling of vapor phase epitaxy with diffusion processes}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {75--85}, publisher = {mathdoc}, volume = {29}, number = {10}, year = {2017}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_2017_29_10_a6/} }