%0 Journal Article
%A Yu. E. Gorbachev
%A M. A. Zatevakhin
%A A. A. Ignatyev
%T Numerical simulation of the $\alpha$-Si:H film groth process in PECVD reactors
%J Matematičeskoe modelirovanie
%D 2004
%P 28-30
%V 16
%N 6
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_2004_16_6_a5/
%G ru
%F MM_2004_16_6_a5