@article{MM_2004_16_6_a5,
     author = {Yu. E. Gorbachev and M. A. Zatevakhin and A. A. Ignatyev},
     title = {Numerical simulation of the $\alpha${-Si:H} film groth process in {PECVD} reactors},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {28--30},
     publisher = {mathdoc},
     volume = {16},
     number = {6},
     year = {2004},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_2004_16_6_a5/}
}