TY  - JOUR
AU  - E. P. Zhidkov
AU  - L. A. Sevastianov
TI  - Macroparameters of an effective distribution and of a~sourse function in the mathematical model of shadowed sputtering
JO  - Matematičeskoe modelirovanie
PY  - 1998
SP  - 35
EP  - 40
VL  - 10
IS  - 9
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1998_10_9_a2/
LA  - ru
ID  - MM_1998_10_9_a2
ER  -