@article{MM_1998_10_7_a1,
     author = {T. A. Kholomina},
     title = {Implantation regime influence upon parameters of~$\mathrm{Si0}_2$ films on silicon},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {21--24},
     publisher = {mathdoc},
     volume = {10},
     number = {7},
     year = {1998},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1998_10_7_a1/}
}