@article{MM_1998_10_4_a1, author = {L. A. Sevastianov}, title = {The mathematical model of shadowed sputtering}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {13--22}, publisher = {mathdoc}, volume = {10}, number = {4}, year = {1998}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1998_10_4_a1/} }