%0 Journal Article
%A Yu. A. Eremin
%A N. V. Orlov
%A A. G. Sveshnikov
%T Investigation of silicon wafer defects by discrete sources method
%J Matematičeskoe modelirovanie
%D 1997
%P 110-118
%V 9
%N 8
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1997_9_8_a10/
%G ru
%F MM_1997_9_8_a10