@article{MM_1997_9_8_a10,
     author = {Yu. A. Eremin and N. V. Orlov and A. G. Sveshnikov},
     title = {Investigation of silicon wafer defects by discrete sources method},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {110--118},
     publisher = {mathdoc},
     volume = {9},
     number = {8},
     year = {1997},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1997_9_8_a10/}
}