@article{MM_1997_9_5_a6,
     author = {O. I. Velichko and F. F. Komarov and N. M. Lukanov and A. N. Muchynski and N. L. Prohorenko and V. A. Tsurko},
     title = {Simulation of impurity diffusion during thermal annealing in the polysilicon-silicon system},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {68--76},
     publisher = {mathdoc},
     volume = {9},
     number = {5},
     year = {1997},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1997_9_5_a6/}
}