TY - JOUR AU - I. E. Mozolevski TI - About mathematical modelling of multidimensional ion implantation problems JO - Matematičeskoe modelirovanie PY - 1996 SP - 25 EP - 38 VL - 8 IS - 1 PB - mathdoc UR - http://geodesic.mathdoc.fr/item/MM_1996_8_1_a2/ LA - ru ID - MM_1996_8_1_a2 ER -