TY  - JOUR
AU  - Yu. A. Eremin
AU  - N. V. Orlov
AU  - A. G. Sveshnikov
TI  - Analysis of mathematical model of silicon wafers contamination based on discrete sources method
JO  - Matematičeskoe modelirovanie
PY  - 1996
SP  - 113
EP  - 127
VL  - 8
IS  - 10
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/
LA  - ru
ID  - MM_1996_8_10_a10
ER  -