%0 Journal Article
%A Yu. A. Eremin
%A N. V. Orlov
%A A. G. Sveshnikov
%T Analysis of mathematical model of silicon wafers contamination based on discrete sources method
%J Matematičeskoe modelirovanie
%D 1996
%P 113-127
%V 8
%N 10
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/
%G ru
%F MM_1996_8_10_a10