@article{MM_1996_8_10_a10,
     author = {Yu. A. Eremin and N. V. Orlov and A. G. Sveshnikov},
     title = {Analysis of mathematical model of silicon wafers contamination based on discrete sources method},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {113--127},
     publisher = {mathdoc},
     volume = {8},
     number = {10},
     year = {1996},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1996_8_10_a10/}
}