TY  - JOUR
AU  - V. A. Zhuk
AU  - V. A. Tsurko
TI  - The numerical simulation of the coupled impurity and point defects diffusion in silicon
JO  - Matematičeskoe modelirovanie
PY  - 1995
SP  - 60
EP  - 74
VL  - 7
IS  - 8
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1995_7_8_a3/
LA  - ru
ID  - MM_1995_7_8_a3
ER  -