@article{MM_1995_7_8_a3, author = {V. A. Zhuk and V. A. Tsurko}, title = {The numerical simulation of the coupled impurity and point defects diffusion in silicon}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {60--74}, year = {1995}, volume = {7}, number = {8}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1995_7_8_a3/} }