@article{MM_1995_7_1_a8,
     author = {V. I. Cherednik and V. M. Treushnikov and A. V. Oleynik and O. A. Usacheva},
     title = {The code for modelling of the photolithographic process of the protective pattern forming by use of positive photoresistors},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {110--117},
     publisher = {mathdoc},
     volume = {7},
     number = {1},
     year = {1995},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1995_7_1_a8/}
}