@article{MM_1994_6_9_a8, author = {K. A. Volosov and L. B. Arkhipenko}, title = {Problem of mathematical modelling of silicon oxidation}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {68--78}, publisher = {mathdoc}, volume = {6}, number = {9}, year = {1994}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1994_6_9_a8/} }