TY  - JOUR
AU  - V. A. Zhuk
AU  - V. A. Tsurko
TI  - Efficient algorithm of the calculation of diffusion in silison during lokal oxidation
JO  - Matematičeskoe modelirovanie
PY  - 1993
SP  - 84
EP  - 96
VL  - 5
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/
LA  - ru
ID  - MM_1993_5_3_a4
ER  -