%0 Journal Article
%A V. A. Zhuk
%A V. A. Tsurko
%T Efficient algorithm of the calculation of diffusion in silison during lokal oxidation
%J Matematičeskoe modelirovanie
%D 1993
%P 84-96
%V 5
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/
%G ru
%F MM_1993_5_3_a4