@article{MM_1993_5_3_a4, author = {V. A. Zhuk and V. A. Tsurko}, title = {Efficient algorithm of the calculation of diffusion in silison during lokal oxidation}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {84--96}, publisher = {mathdoc}, volume = {5}, number = {3}, year = {1993}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1993_5_3_a4/} }