%0 Journal Article %A V. V. Menyailenko %A V. A. Moroz %A A. A. Rudenko %T Problems and possibilities of mathematical modelling for silicon integrated-circuit technology %J Matematičeskoe modelirovanie %D 1992 %P 13-26 %V 4 %N 6 %I mathdoc %U http://geodesic.mathdoc.fr/item/MM_1992_4_6_a1/ %G ru %F MM_1992_4_6_a1