TY  - JOUR
AU  - B. I. Friedlender
TI  - On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask
JO  - Matematičeskoe modelirovanie
PY  - 1991
SP  - 48
EP  - 58
VL  - 3
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
LA  - ru
ID  - MM_1991_3_1_a5
ER  -