%0 Journal Article
%A B. I. Friedlender
%T On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask
%J Matematičeskoe modelirovanie
%D 1991
%P 48-58
%V 3
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/
%G ru
%F MM_1991_3_1_a5