@article{MM_1991_3_1_a5, author = {B. I. Friedlender}, title = {On a~low of approximate changing of ``bird beak'' during silicon oxidation in the presence of a~mask}, journal = {Matemati\v{c}eskoe modelirovanie}, pages = {48--58}, publisher = {mathdoc}, volume = {3}, number = {1}, year = {1991}, language = {ru}, url = {http://geodesic.mathdoc.fr/item/MM_1991_3_1_a5/} }