TY  - JOUR
AU  - T. M. Makhviladze
AU  - E. G. Panteleev
AU  - M. E. Sarychev
TI  - Theoretical study of polymer resist direct etching by heavy ions of average energy
JO  - Matematičeskoe modelirovanie
PY  - 1991
SP  - 11
EP  - 17
VL  - 3
IS  - 1
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/
LA  - ru
ID  - MM_1991_3_1_a1
ER  -