%0 Journal Article
%A T. M. Makhviladze
%A E. G. Panteleev
%A M. E. Sarychev
%T Theoretical study of polymer resist direct etching by heavy ions of average energy
%J Matematičeskoe modelirovanie
%D 1991
%P 11-17
%V 3
%N 1
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/
%G ru
%F MM_1991_3_1_a1