@article{MM_1991_3_1_a1,
     author = {T. M. Makhviladze and E. G. Panteleev and M. E. Sarychev},
     title = {Theoretical study of polymer resist direct etching by heavy ions of average energy},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {11--17},
     publisher = {mathdoc},
     volume = {3},
     number = {1},
     year = {1991},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1991_3_1_a1/}
}