TY  - JOUR
AU  - T. M. Makhviladze
AU  - E. G. Panteleev
AU  - M. E. Sarychev
TI  - Theoretical study of polymer resists direct etching, accompanied by polymer matrix movement
JO  - Matematičeskoe modelirovanie
PY  - 1990
SP  - 3
EP  - 14
VL  - 2
IS  - 3
PB  - mathdoc
UR  - http://geodesic.mathdoc.fr/item/MM_1990_2_3_a0/
LA  - ru
ID  - MM_1990_2_3_a0
ER  -