%0 Journal Article
%A T. M. Makhviladze
%A E. G. Panteleev
%A M. E. Sarychev
%T Theoretical study of polymer resists direct etching, accompanied by polymer matrix movement
%J Matematičeskoe modelirovanie
%D 1990
%P 3-14
%V 2
%N 3
%I mathdoc
%U http://geodesic.mathdoc.fr/item/MM_1990_2_3_a0/
%G ru
%F MM_1990_2_3_a0