@article{MM_1990_2_3_a0,
     author = {T. M. Makhviladze and E. G. Panteleev and M. E. Sarychev},
     title = {Theoretical study of polymer resists direct etching, accompanied by polymer matrix movement},
     journal = {Matemati\v{c}eskoe modelirovanie},
     pages = {3--14},
     publisher = {mathdoc},
     volume = {2},
     number = {3},
     year = {1990},
     language = {ru},
     url = {http://geodesic.mathdoc.fr/item/MM_1990_2_3_a0/}
}